Concepedia

Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma

Jeong-Beom Lee, Sang‐Hun Seo, Hong‐Young Chang

Thin Solid Films · 2010 · 12 citations · 20 references

DOI

Concepts

References

20

Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low-pressure radio frequency discharges

Christian Böhm, J. Perrin · Review of Scientific Instruments · 1993 · 248 citations

, , +14

Electronegativity of low-pressure high-density oxygen discharges

Igor Kouznetsov, K K Patel, M. A. Lieberman · Journal of Physics D Applied Physics · 2001 · 223 citations

, , +10

Effects of low-frequency modulation on rf discharge chemical vapor deposition

Yuichiro Watanabe, Masaharu Shiratani, Y. Kubo et al. · Applied Physics Letters · 1988 · 170 citations

, , +16

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

David Gahan, Borislav Dolinaj, M. B. Hopkins · Review of Scientific Instruments · 2008 · 140 citations

, , +9

Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine

T. H. Ahn, Keiji Nakamura, H. Sugai · Plasma Sources Science and Technology · 1996 · 129 citations

, , +16