Formation of thin β-FeSi2 template layer for the epitaxial growth of thick film on Si (111) substrate

R. Kuroda, Zheng-Xin Liu, Yasuhiro Fukuzawa, Yasuhito Suzuki, Masato Osamura, Shinan Wang, Naotaka Otogawa, Teruhisa Ootsuka, Takahiro Mise, Yasushi Hoshino,

Thin Solid Films · 2004 · 23 citations · 9 references

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