UHV-CVD growth and annealing of thin fully relaxed Ge films on (001)Si - Concepedia

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UHV-CVD growth and annealing of thin fully relaxed Ge films on (001)Si

28

Citations

14

References

2004

Year

Mathieu Halbwax, Mathieu Rouvière, Yunlin Zheng, D. Débarre, Nguyễn Hữu Lâm, J-L. Cercus, C. Clerc, Vy Yam, S. Laval, Éric Cassan,

Optical Materials

Materials ScienceMaterials EngineeringEngineeringRelaxed Ge FilmsApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorEpitaxial GrowthChemical Vapor DepositionUhv-cvd GrowthThin Film Processing

References

	Year	Citations

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