A point-like source of extreme ultraviolet radiation based on a discharge in a non-uniform gas flow, sustained by powerful gyrotron radiation of terahertz frequency band

Abstract

The possibility and prospects of extreme ultraviolet (UV) point-like source development are discussed in the present paper. The UV source is based on the discharge sustained by powerful gyrotron radiation of terahertz (THz) frequency band in non-uniform gas flow injected into vacuum volume through a nozzle with diameter less than 1 mm. Recent developments of THz-band gyrotrons with appropriate power level made such discharges possible. First experimental results on a point-like plasma creation by 100 kW radiation of 0.67 THz gyrotron are presented. The possibility of discharge localization within the area less than 1 mm is demonstrated. The discharge emission within the wavelength range from 112 nm to 650 nm was studied. The measured power of light emission in the range of 112–180 nm was measured to be up to 10 kW.