MOEMS Accelerometer Based on Microfiber Knot Resonator

Abstract

<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-<formula formulatype="inline"><tex Notation="TeX">$\mu$</tex></formula>m-diameter MKR, fabricated by a 1.1-<formula formulatype="inline"><tex Notation="TeX">$\mu$</tex> </formula>m-diameter microfiber, has a high quality factor (<formula formulatype="inline"> <tex Notation="TeX">$Q$</tex></formula>-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the <formula formulatype="inline"><tex Notation="TeX">$Q$</tex></formula>-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber. </para>