Buried dopant and defect layers for device structures with high-energy ion implantation

Proximity gettering with mega-electron-volt carbon and oxygen implantations

Hiu Yung Wong, N.W. Cheung, Paul K. Chu et al. · Applied Physics Letters · 1988 · 162 citations

Materials Science, Materials Engineering, Electrical Engineering +15

On interstitial dislocation loops in aluminium bombarded with alpha-particles

D.J. Mazey, R.S. Barnes, A. Howie · Philosophical magazine · 1962 · 105 citations

Materials Science, Ion Implantation, Interstitial Dislocation Loops +15

MeV-energy B+, P+ and As+ ion implantation into Si

M. Tamura, N. Natsuaki, Yasuo Wada et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 93 citations

Mev-energy B+, Ion Implantation, Applied Physics +1

The inverse-narrow-width effect

L.A. Akers · IEEE Electron Device Letters · 1986 · 87 citations

Device Modeling, Electrical Engineering, Engineering +11

Profile studies of MeV ions implanted into Si

Hiu Yung Wong, Erya Deng, N.W. Cheung et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 57 citations

Ion Implantation, Electrical Engineering, Mev Ions +3