Applied Physics Letters · 2009 · 21 citations · 11 references
Natural SciencesPhysicsNuclear InstrumentationPlasma PhysicsSpectroscopyAbsorption SpectroscopyLow-temperature PlasmasPlasma DiagnosticsPlasma FundamentalsPlasma SimulationLow-pressure Plasmas
The plasma absorption probe is a recently developed tool for efficient determination of electron densities of low temperature plasmas. The occurrence of multiple absorption signals was a serious drawback for interpretation of the probe data. To remedy this drawback, a spherically symmetric design of an absorption probe is proposed. A spherical probe is tested in experiment and simulation and the suppression of the multiple absorption signals is demonstrated. The proof of principle for the concept is given.
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Principles of plasma discharges and material processing
Robert Keatch · Microelectronics Journal · 1996 · 322 citations
Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann · Applied Physics Letters · 2008 · 98 citations