Practical implementation of a two-hemisphere plasma absorption probe

Christian Scharwitz, Marc Böke, J. Winter, Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann

Applied Physics Letters · 2009 · 21 citations · 11 references

Concepts

Abstract

The plasma absorption probe is a recently developed tool for efficient determination of electron densities of low temperature plasmas. The occurrence of multiple absorption signals was a serious drawback for interpretation of the probe data. To remedy this drawback, a spherically symmetric design of an absorption probe is proposed. A spherical probe is tested in experiment and simulation and the suppression of the multiple absorption signals is demonstrated. The proof of principle for the concept is given.

References

11