Concepedia
Statistics
Publications
5
Citations
314
H-Index
Active since
2005
Affiliations
École Polytechnique(Current)
Laboratoire de Physique des Plasmas
Centre National de la Recherche Scientifique
Garrett Curley is an author at École Polytechnique specializing in plasma physics, natural sciences, and electron density.
Publications per year
2005–2009
Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux
Jean‐Paul Booth, Garrett Curley, Dragana Marić et al. · Plasma Sources Science and Technology · 2009 · 117 citations
Natural Sciences, Electrical Engineering, Materials Science +14
Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas
Garrett Curley, Dragana Marić, Cormac Corr et al. · Plasma Sources Science and Technology · 2007 · 79 citations
Natural Sciences, Chemistry, Physics +14
A novel technique for plasma density measurement using surface-wave transmission spectra
Sebastien Dine, Garrett Curley, Cormac Corr et al. · Plasma Sources Science and Technology · 2005 · 75 citations
Natural Sciences, Electrical Engineering, Physics +17
Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy
Jean‐Paul Booth, Cormac Corr, Garrett Curley et al. · Applied Physics Letters · 2006 · 33 citations · Full text
Natural Sciences, Chemistry, Materials Science +13
The dynamics of the charged particles in a dual frequency capacitively coupled dielectric etch reactor.
Garrett Curley · HAL (Le Centre pour la Communication Scientifique Directe) · 2008 · 10 citations · Full text
Natural Sciences, Materials Science, Physics +14
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