Growth of cubic III-nitrides by gas source MBE using atomic nitrogen plasma: GaN, AlGaN and AlN

Hajime Okumura, Hiroshi Hamaguchi, T. Koizumi, K. Balakrishnan, Yuuki Ishida, Munetaka Arita, Shigefusa F. Chichibu, Hideyuki Nakanishi, T. Nagatomo, S. Yoshida

Journal of Crystal Growth · 1998 · 74 citations · 10 references

Concepts

References

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