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Growth of cubic III-nitrides by gas source MBE using atomic nitrogen plasma: GaN, AlGaN and AlN

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringGas Source MbeApplied PhysicsAtomic Nitrogen PlasmaAluminum Gallium NitrideGan Power DeviceCubic Iii-nitridesCategoryiii-v Semiconductor