An automatic focusing and astigmatism correction system for the SEM and CTEM

Abstract

SUMMARY Focusing and correcting the astigmatism of an electron microscope can be time consuming and difficult to achieve accurately. An automatic method of performing these tasks using an on‐line computer system and a digital framestore has been developed. The method is applicable to noisy images in both scanning and conventional transmission electron microscopes. It is capable of setting focus and correcting astigmatism at least as accurately as can be achieved by an experienced operator.