Three-dimensional micro-fabrication on copper and nickel

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

Surface micromachining for microelectromechanical systems

J.M. Bustillo, Roger T. Howe, R.S. Muller · Proceedings of the IEEE · 1998 · 639 citations

Engineering, Materials Engineering, Materials Science +17

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 583 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

Electrochemical Micromachining

Rolf Schuster, Viola Kirchner, P. Allongue et al. · Science · 2000 · 582 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Micromachining for optical and optoelectronic systems

Ming C. Wu · Proceedings of the IEEE · 1997 · 264 citations

Engineering, Mechanical Engineering, Microfabrication +16