Concepedia

Modification of thin film properties by ion bombardment during deposition

James Harper, Jerome J. Cuomo, R. J. Gambino, H. R. Kaufman

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 84 citations · 30 references

DOI

Concepts

References

30

<i>Advances in Electronics and Electron Physics</i>

L. Marton, Robert L. Sproull · Physics Today · 1960 · 1.8K citations

, , +13

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

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Ion-beam-deposited polycrystalline diamondlike films

E. G. Spencer, P. H. Schmidt, DC Joy et al. · Applied Physics Letters · 1976 · 312 citations

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Ion-beam-assisted deposition of thin films

Peter Martin, H. A. Macleod, R. P. Netterfield et al. · Applied Optics · 1983 · 281 citations

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Technology and applications of broad-beam ion sources used in sputtering. Part I. Ion source technology

H. R. Kaufman, J. J. Cuomo, J. M. E. Harper · Journal of Vacuum Science and Technology · 1982 · 253 citations

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