Speeding Up Fluid Models for Gas Discharges by Implicit Treatment of the Electron Energy Source Term

Large-signal analysis of a silicon Read diode oscillator

D.L. Scharfetter, H.K. Gummel · IEEE Transactions on Electron Devices · 1969 · 2.2K citations

Engineering, Electrical Engineering, Microelectronics +16

Computational fluid dynamics

F. Walkden · Nature · 1977 · 681 citations · Full text

Numerical model of rf glow discharges

Physical review. A, General physics · 1987 · 367 citations

Natural Sciences, Electrical Engineering, Physics +17

Two-dimensional modeling of high plasma density inductively coupled sources for materials processing

Peter L. G. Ventzek, Robert J. Hoekstra, Mark J. Kushner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 338 citations

Natural Sciences, Electrical Engineering, Physics +17

Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor

L. C. Pitchford · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1995 · 311 citations

Natural Sciences, Electrical Engineering, Physics +17