Deposition of HWCVD poly-Si films at a high growth rate

Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour deposition

R.E.I. Schropp, K. F. Feenstra, Edith C. Molenbroek et al. · Philosophical Magazine B · 1997 · 131 citations

Engineering, Materials Engineering, Materials Science +17

Hot-Wire CVD Poly-Silicon Films for Thin Film Devices

J.K. Rath, F. D. Tichelaar, H. Meiling et al. · MRS Proceedings · 1998 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +13

Profiled Poly-Silicon Films by Hot-Wire Chemical Vapour Deposition for Solar Cells on Cheap Metal Substrate

J.K. Rath, F. D. Tichelaar, R.E.I. Schropp · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1999 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17