Profiled Poly-Silicon Films by Hot-Wire Chemical Vapour Deposition for Solar Cells on Cheap Metal Substrate

J.K. Rath, F. D. Tichelaar, R.E.I. Schropp

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1999 · 26 citations · 0 references

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