M.Y.S. Rusche is an author at Utrecht University specializing in applied physics, engineering, and microfabrication.
Top concepts
EngineeringApplied PhysicsPhysicsThin FilmsHeat TransferSurface ScienceMaterial ScienceMicrofabricationElectrical Engineering
Publications per year
2003–2003
2
2
Deposition of HWCVD poly-Si films at a high growth rate
J.K. Rath, A.J. Hardeman, C.H.M. van der Werf et al. · Thin Solid Films · 2003 · 18 citations
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