Concepedia
Thin Solid Films · 2003 · 35 citations · 9 references
Electrical EngineeringEngineeringPhysicsMicrofabricationApplied PhysicsFilament TemperatureSemiconductor Device FabricationHeat TransferSilicon On Insulator
9
Hydrogen atom detection in the filament-assisted diamond deposition environment
F. G. Celii, J. E. Butler · Applied Physics Letters · 1989 · 194 citations
Engineering, Chemistry, Filament Temperature +17
Activity of tungsten and rhenium filaments in CH<sub>4</sub>/H<sub>2</sub> and C<sub>2</sub>H<sub>2</sub>/H<sub>2</sub> mixtures: Importance for diamond CVD
M. Sommer, F. W. Smith · Journal of materials research/Pratt's guide to venture capital sources · 1990 · 98 citations
Materials Science, Diamond-like Carbon, Engineering +9
Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy
Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations
Engineering, Chemistry, Silicon On Insulator +16
Structural changes of tungsten heating filaments during CVD of diamond
E. Zeiler, S. Schwarz, Stefan Rosiwal et al. · Materials Science and Engineering A · 2002 · 47 citations
Materials Engineering, Materials Science, Nuclear Ceramic +5
The influence of different catalyzers in hot-wire CVD for the deposition of polycrystalline silicon thin films
P.A.T.T. van Veenendaal, O.L.J. Gijzeman, J.K. Rath et al. · Thin Solid Films · 2001 · 41 citations
Materials Science, Engineering, Surface Science +8