Hydrogen atom detection in the filament-assisted diamond deposition environment

Abstract

The resonance-enchanced multiphoton ionization (REMPI) technique was employed for detection of gas phase atomic hydrogen in the filament-asisted diamond growth environment. The H atom REMPI signal varied significantly with the reactant CH4/H2 fraction as well as with the filament temperature. We interpret these observations as evidence for the surface role of atomic hydrogen in the diamond growth mechanism. The spatial resolution of the REMPI technique allowed us to confirm that hydrogen atom transport in the deposition region occurs by diffusion.