1982 · 22 citations · 2 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyCurrent-voltage CharacteristicsDevice CharacterizationDevice ModelingElectrical CharacterizationMetal-oxide-semiconductor Field-effect TransistorsCapacitanceCapacitance MeasurementCapacitance Measurement TechniquesCapacitance-voltage CharacteristicsCapacitance-voltage CharacterizationCapacitance-voltage MeasurementsExperimental Data CollectionSubstrate Effects
An electrometer/coulombmeter circuit technique to measure capacitance characteristics of the MOS transistor will be discussed. Experimental data for substrate capacitances, non-reciprocal elements and non-quasi-static effects, compared to theory, will be presented.
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