Quasi-monolithic heat flux microsensor based on porous silicon boxes

Characterization of phosphorus and boron heavily doped LPCVD polysilicon films in the temperature range 293-373 K

Mohamed Boutchich, Katir Ziouche, P. Godts et al. · IEEE Electron Device Letters · 2002 · 32 citations

Characterization Benches, Engineering, Thin Film Process Technology +16

Spectral and structural features of porous silicon prepared by chemical and electrochemical etching processes

Shelagh D. Campbell, L. A. Jones, E. Nakamichi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 26 citations

Engineering, Nanoporous Material, Surface Nanotechnology +22

Heat flux sensor with minimal impact on boundary conditions

Arash Saidi, Jungho Kim · Experimental Thermal and Fluid Science · 2004 · 25 citations

Ground Heat Flux, Engineering, Calibration +9

Package-free infrared micro sensor using polysilicon thermopile

Mohamed Boutchich, Katir Ziouche, M. Ait-Hammouda Yala et al. · Sensors and Actuators A Physical · 2005 · 21 citations

Engineering, Thermography, Infrared Sensor +6

Nanoscale nature and low thermal conductivity of porous silicon layers

Vladimir Lysenko, V. Gliba, A. Dittmar et al. · Applied Surface Science · 1998 · 14 citations

Materials Science, Engineering, Nanoporous Material +6