Characterization of spin-coated silicate and phosphosilicate thin films prepared by the sol-gel method

Advanced inorganic chemistry

Choice Reviews Online · 1999 · 14.3K citations

Inorganic Chemistry, Chemical Engineering, Engineering +8

Advanced inorganic chemistry

W.J. Orville-Thomas · Journal of Molecular Structure · 1973 · 6.8K citations

Inorganic Chemistry, Advanced Inorganic Chemistry, Chemistry +3

Comparison of properties of dielectric films deposited by various methods

W. A. Pliskin · Journal of Vacuum Science and Technology · 1977 · 484 citations

Thin Film Physics, Dielectrics, Engineering +18

Oxynitride Glass Formation from Gels

C. Jeffrey Brinker, David M. Haaland · Journal of the American Ceramic Society · 1983 · 99 citations

Materials Science, Materials Engineering, Silicate Ceramics +14

Diffusion in III-V semiconductors from spin-on-film sources

N. Arnold, R. Schmitt, K. Heime · Journal of Physics D Applied Physics · 1984 · 59 citations

Semiconductors, Spintronics, Materials Science +12