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Slicing, cleaning and kerf analysis of germanium wafers machined by wire electrical discharge machining

Electrical EngineeringEngineeringMicrofabricationMaterial MachiningTool WearMechanical EngineeringGermanium WafersMachine ToolManufacturing EngineeringElectronic PackagingMicroelectronicsAbrasive MachiningElectrical Insulation