Publication | Closed Access
Determination of Young's moduli of micromechanical thin films using the resonance method
163
Citations
8
References
1992
Year
Materials ScienceEngineeringMicromechanicsMicrofabricationMechanical EngineeringApplied PhysicsMicromechanical Thin FilmsResonance MethodSolid MechanicsThin FilmsMicro-electromechanical SystemNanomechanicsMechanics Of MaterialsMicrostructureThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1