Determination of Young's moduli of micromechanical thin films using the resonance method

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

Natural Sciences, Materials Engineering, Materials Science +15

Miniaturization of Tuning Forks

W.E. Newell · Science · 1968 · 304 citations

Engineering, Bioengineering, Microelectromechanical Systems +2

Young’s modulus measurements of thin films using micromechanics

K. Petersen, C. R. Guarnieri · Journal of Applied Physics · 1979 · 296 citations

Natural Sciences, Materials Engineering, Materials Science +11

Measuring stiffnesses and residual stresses of silicon nitride thin films

Soonil Hong, Timothy P. Weihs, J. C. Bravman et al. · Journal of Electronic Materials · 1990 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +14

Local Stress Measurement in Thin Thermal SiO2 Films on Si Substrates

S. C. H. Lin, I. Pugacz-Muraszkiewicz · Journal of Applied Physics · 1972 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +17