Measuring stiffnesses and residual stresses of silicon nitride thin films

A method for interpreting the data from depth-sensing indentation instruments

M. Doerner, William D. Nix · Journal of materials research/Pratt's guide to venture capital sources · 1986 · 2.8K citations

Dentistry, Civil Engineering, 3D Modeling +5

Hardness measurement at penetration depths as small as 20 nm

J. B. Pethicai, R. Hutchings, W. C. Oliver · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1983 · 924 citations

Natural Sciences, Materials Engineering, Materials Science +17

Vickers Indentation Curves of Magnesium Oxide (MgO)

Jean‐Luc Loubet, J. M. Georges, O. Marchesini et al. · Journal of Tribology · 1984 · 411 citations

Natural Sciences, Materials Engineering, Materials Science +16

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Timothy P. Weihs, Soon-Il Hong, J. C. Bravman et al. · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 380 citations

Natural Sciences, Materials Science, Mechanical Engineering +14

An ultra-low-load penetration hardness tester

D. Newey, M. A. Wilkins, H. M. Pollock · Journal of Physics E Scientific Instruments · 1982 · 223 citations

Natural Sciences, Materials Engineering, Materials Science +17