Micro electrochemical machining for complex internal micro features

References

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Micro and Nano Machining by Electro-Physical and Chemical Processes K. P. Rajurkar, Gideon Levy, Ajay P. Malshe, CIRP Annals Materials ScienceEngineeringMaterial ProcessingMicrofabricationMaterial Machining	2006	379
Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision Matthias Kock, Viola Kirchner, Rolf Schuster Electrochimica Acta Electrical EngineeringEngineeringMicromachinesLithographical PrecisionMicrofabrication	2003	260
Micro electrochemical milling Bo Hyun Kim, Shi Hyoung Ryu, Deok Ki Choi, Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringMicromanufacturingMicro StructuresElectrometallurgy	2004	237
Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid B.H. Kim, C.W. Na, Y.S. Lee, CIRP Annals Materials ScienceChemical EngineeringEngineeringMaterial ProcessingMicrofabrication	2005	183
The Effects of Tool Electrode Size on Characteristics of Micro Electrochemical Machining B.J. Park, B.H. Kim, C.N. Chu CIRP Annals EngineeringTool Electrode SizeMicrofabricationMaterial MachiningMechanical Engineering	2006	115
Electrochemical machining of stainless steel microelements with ultrashort voltage pulses Viola Kirchner, L. Cagnon, Rolf Schuster, Applied Physics Letters Materials ScienceElectrochemical MachiningTool ElectrodesElectrometallurgyEngineering	2001	114
EDM-Lathe for Micromachining T. Masuzawa, Kenji Okajima, Takuya Taguchi, CIRP Annals EngineeringMicromachinesMicrofabricationMechanical EngineeringMicroactuator	2002	48

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