CIRP Annals · 2009 · 104 citations · 8 references
EngineeringManufacturing EngineeringMaterials EngineeringElectrochemistryMicroelectromechanical SystemsMicrofabricationMachiningMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicromachiningSurface MicromachiningElectrochemical MicromachiningElectrode FabricationMachining TechnologyManufacturingMicroelectromechanical System Fabrication
8
Electrochemical Micromachining
Rolf Schuster, Viola Kirchner, P. Allongue et al. · Science · 2000 · 582 citations
Engineering, Manufacturing Engineering, Materials Engineering +17
Micro and Nano Machining by Electro-Physical and Chemical Processes
K. P. Rajurkar, Gideon Levy, Ajay P. Malshe et al. · CIRP Annals · 2006 · 381 citations
Engineering, Manufacturing Engineering, Materials Science +14
Bo Hyun Kim, Shi Hyoung Ryu, Deok Ki Choi et al. · Journal of Micromechanics and Microengineering · 2004 · 237 citations
Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid
B.H. Kim, C.W. Na, Y.S. Lee et al. · CIRP Annals · 2005 · 183 citations
Engineering, Manufacturing Engineering, Materials Science +12