Journal of Electronic Materials · 2002 · 75 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsElectronic MaterialsChemical Vapor DepositionHigh-temperature MaterialsSemiconductor Device MaterialsSilicon MaterialsSilicon CarbideSilicon Carbide (Sic) MaterialsSublimation
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The status of SiC bulk growth from an industrial point of view
St.G. Müller, R Glass, H. McD. Hobgood et al. · Journal of Crystal Growth · 2000 · 121 citations