Solid-State Electronics · 1986 · 11 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsAmorphous MaterialsAmorphous SolidsCarbon NanomaterialsThin-film DepositionThin-film MaterialsAmorphous CarbonAmorphous Thin FilmsCarbon MaterialsPlasma SputteringSputter DepositionSputtering ProcessesSputtering Techniques
24