Concepedia

Characterization of epitaxial lanthanum lutetium oxide thin films prepared by pulsed-laser deposition

J. Schubert, O. Trithaveesak, W. Zander, M. Roeckerath, T. Heeg, H.Y. Chen, Chun‐Lin Jia, P. Meuffels, Yufei Jia, Darrell G. Schlom

Applied Physics A · 2007 · 28 citations · 7 references

DOI

Concepts

References

7

A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

Darrell G. Schlom, J. H. Haeni · MRS Bulletin · 2002 · 307 citations

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Effects of crystallization on the electrical properties of ultrathin HfO2 dielectrics grown by atomic layer deposition

Hyoungsub Kim, Paul C. McIntyre, Krishna C. Saraswat · Applied Physics Letters · 2003 · 228 citations

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Ternary rare-earth metal oxide high-k layers on silicon oxide

Chao Zhao, T. Witters, Bert Brijs et al. · Applied Physics Letters · 2005 · 133 citations · Full text

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Atomic-layer deposition of Lu2O3

G. Scarel, Emiliano Bonera, Claudia Wiemer et al. · Applied Physics Letters · 2004 · 100 citations

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Amorphous lanthanum lutetium oxide thin films as an alternative high-κ gate dielectric

J. M. J. Lopes, M. Roeckerath, T. Heeg et al. · Applied Physics Letters · 2006 · 97 citations · Full text

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