Characteristics of a commercially available silicon-on-insulator MEMS material - Concepedia

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Characteristics of a commercially available silicon-on-insulator MEMS material

76

Citations

49

References

2007

Year

David C. Miller, Brad Boyce, Michael T. Dugger, Thomas Edward Buchheit, Ken Gall

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringEngineeringMicrofabricationElectronic PackagingSilicon On InsulatorMicroelectronicsMicro-electromechanical SystemElectrical Insulation

References

	Year	Citations

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