Publication | Closed Access
Anisotropic crystal etching: A simulation program
40
Citations
8
References
1992
Year
Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsAnisotropic Crystal EtchingPlasma EtchingCrystallographyNanolithography MethodAnisotropic Material
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