Measuring Accuracy of Three-Dimensional Displacements in Holographic Interferometry

Abstract

In order to establish a quantitative method of measuring the distribution of three-dimensional displacements by holographic interferometry, measuring errors caused by the following two factors are analyzed quantitatively: (i) reading error of fringe order, (ii) setting error of observing and illuminating directions. As an application of the result, these two factors are calculated for a typical optical arrangement and three-dimensional displacements in the deflection of a cantilever model measured quantitatively. On the basis of the results of the analysis, some optical arrangements were evaluated.