Concepedia

Interferometric Metrology

Interferometric Metrology is a dimensional measurement methodology that employs the interference of coherent light waves to achieve nanometer-level precision in the assessment of surface form, topography, and physical quantities by converting optical path differences into measurable interference fringe patterns.

1.9K

Publications

74.7K

Citations

4.2K

Authors

986

Institutions

Publications per year

2017–2026

223

Parents

Publications

1.9K

Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry

Mitsuo Takeda, Hideki Ina, Seiji Kobayashi · Journal of the Optical Society of America · 1982 · 4.2K citations

, , +15

Fringe projection techniques: Whither we are?

Sai Siva Gorthi, Pramod K. Rastogi · Optics and Lasers in Engineering · 2009 · 1.3K citations

, , +7

Measurement of intraocular distances by backscattering spectral interferometry

Adolf F. Fercher, Christoph K. Hitzenberger, Gerhard Kamp et al. · Optics Communications · 1995 · 1.2K citations

, , +12

Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

P. Hariharan, B. F. Oreb, Tomoaki Eiju · Applied Optics · 1987 · 918 citations

, , +10

Eye-length measurement by interferometry with partially coherent light

Adolf F. Fercher, Klaus Mengedoht, W. Werner · Optics Letters · 1988 · 509 citations

, , +13

1–5 of 1.9K

Authors

4.2K

  1. JC
    James C. Wyant

    University of Arizona, United States

    22 publications · 2.3K citations

    18

    h-index

  2. PJ
    Peter J. de Groot

    Zygo (United States), United States

    21 publications · 2K citations

    17

    h-index

  3. KH
    Kenichi Hibino

    National Institute of Advanced Industrial Science and Technology, Japan

    18 publications · 563 citations

    15

    h-index

  4. PH
    P. Hariharan

    Commonwealth Scientific and Industrial Research Organisation, Australia

    16 publications · 1.4K citations

    15

    h-index

  5. YK
    Yangjin Kim

    The University of Tokyo, Japan

    15 publications · 373 citations

    14

    h-index

1–5 of 4.2K

Institutions

986

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    26 h-index

    92 publications

    4.8K citations

  2. University of Arizona

    Tucson, United States

    24 h-index

    110 publications

    7.3K citations

  3. Zygo (United States)

    Middlefield, United States

    22 h-index

    41 publications

    3.8K citations

  4. National Physical Laboratory

    London, United Kingdom

    21 h-index

    54 publications

    2.1K citations

  5. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    21 h-index

    87 publications

    3.7K citations

  6. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    20 h-index

    87 publications

    2.5K citations

  7. Chinese Academy of Sciences

    Beijing, China

    19 h-index

    112 publications

    2.9K citations

  8. Centre National de la Recherche Scientifique

    Paris, France

    17 h-index

    70 publications

    2.1K citations

1–8 of 986

Venues

  1. Applied Optics

    349 publications · 17K citations

    62

    h-index

  2. Optics Letters

    91 publications · 5K citations

    41

    h-index

  3. Optics Express

    121 publications · 4.6K citations

    35

    h-index

  4. Optics and Lasers in Engineering

    90 publications · 4.5K citations

    31

    h-index

  5. Measurement Science and Technology

    74 publications · 2.5K citations

    27

    h-index

1–5