Development of ballistic electron cold cathode by a low-temperature processing of polycrystalline silicon films - Concepedia

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Development of ballistic electron cold cathode by a low-temperature processing of polycrystalline silicon films

18

Citations

6

References

2002

Year

Tsutomu Ichihara, Yoshiaki Honda, Koichi Aizawa, Takuya Komoda, Nobuyoshi Koshida

Journal of Crystal Growth

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsPolycrystalline Silicon FilmsLow-temperature ProcessingSemiconductor Device FabricationVacuum DeviceThin FilmsThin Film Processing

References

	Year	Citations

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