Correlation between nanostructure and electron emission characteristics of a ballistic electron surface-emitting device

Tsutomu Ichihara, T. Baba, Takuya Komoda, +1

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringElectron-beam LithographyBallistic Electron EmissionElectron Emission CharacteristicsVacuum Device +15

A high performance amorphous Si/sub 1-x/C/sub x/:H thermistor bolometer based on micro-machined structure

Tsutomu Ichihara, Y. Watabe, Yoshihisa Honda, +1

EngineeringVacuum DeviceSilicon On InsulatorSemiconductor DeviceNanoelectronics +14

Key role of nanocrystalline feature in porous polycrystalline silicon diodes for efficient ballistic electron emission

Tsutomu Ichihara, Takashi Hatai, Koichi Aizawa, +3

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceNanocrystalline FeatureElectrical EngineeringPhotoluminescenceKey Role +13

Annealing effects on the operation stability of ballistic electron emission from electrochemically oxidized nanocrystalline silicon diodes

Tsutomu Ichihara, Yoshiaki Honda, T. Baba, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringBallistic Electron EmissionSilicon On InsulatorSemiconductor DeviceSemiconductor Nanostructures +17

Development of ballistic electron cold cathode by a low-temperature processing of polycrystalline silicon films

Tsutomu Ichihara, Yoshiaki Honda, Koichi Aizawa, +2

Journal of Crystal Growth

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsPolycrystalline Silicon Films +5

Fabrication of a 7.6‐in.‐diagonal prototype ballistic electron surface‐emitting display on a glass substrate

T. Komoda, Tsutomu Ichihara, Yuki Honda, +7

Journal of the Society for Information Display

Materials ScienceElectrical EngineeringElectronic DevicesEngineeringElectronic Materials +12

Vacuum-ultraviolet light emission from xenon directly excited by ballistic output electrons of nanocrystalline silicon planar cathode

Tsutomu Ichihara, Takashi Hatai, Nobuyoshi Koshida

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringGlow DischargeVacuum DeviceBallistic Output ElectronsNanoelectronics +16

28.4: Matrix Flat‐Panel Application of Ballistic Electron Surface‐Emitting Display

Takuya Komoda, Yoshiaki Honda, Takashi Hatai, +5

SID Symposium Digest of Technical Papers

Materials ScienceElectrical EngineeringElectronic DevicesEngineeringPlasma Electronics +10

Digital Chemical Vapor Deposition of SiO₂ Using a Repetitive Reaction of Triethylsilane/Hydrogen and Oxidation

Hiroyuki Sakaue, Masayuki Nakano, Tsutomu Ichihara, +1

Japanese Journal of Applied Physics

Sio 2Chemical EngineeringEngineeringSurface ScienceApplied Physics +9

39.3: Development of a Low Temperature Process of Ballistic Electron Surface‐Emitting Display (BSD) on a Glass Substrate

Takuya Komoda, Yoshiaki Honda, Tsutomu Ichihara, +6

SID Symposium Digest of Technical Papers

EngineeringElectron-beam LithographyAbstract Ballistic ElectronElectron OpticLow Temperature +14