Statistics
Publications
10
Citations
378
H-Index
10
Active since
1991
Y. Watabe is an author at Sanyo (Japan) specializing in materials science, semiconductor materials, and engineering.
Publications per year
1991–2016
10
10
High rate deposition of a-Si:H and a-SiNx:H by VHF PECVD
Toshiyuki Takagi, Kazushige Takechi, Yukito Nakagawa et al. · Vacuum · 1998 · 34 citations
1–5 of 10