Concepedia

High rate deposition of a-Si:H and a-SiNx:H by VHF PECVD

Toshiyuki Takagi, Kazushige Takechi, Yukito Nakagawa, Y. Watabe, Shinichi Nishida

Vacuum · 1998 · 34 citations · 12 references

DOI

Concepts

References

12

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations

, , +16

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

, , +17

Capacitively coupled glow discharges at frequencies above 13.56 MHz

M. Surendra, David B. Graves · Applied Physics Letters · 1991 · 172 citations

, , +17

Characterization of Plasma Silicon Nitride Layers

W. A. P. Claassen, W. G. J. N. Valkenburg, F.H.P.M. Habraken et al. · Journal of The Electrochemical Society · 1983 · 153 citations

, , +17

High-rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency

H. Curtins, N. Wyrsch, A. Shah · Electronics Letters · 1987 · 151 citations

, , +17