Statistics
Publications
4
Citations
143
H-Index
4
Active since
1991
Affiliations
NEC (Japan)(Current)
Shinichi Nishida is an author at NEC (Japan) specializing in materials science, engineering, and microelectronics.
Publications per year
1991–2001
4
4
High rate deposition of a-Si:H and a-SiNx:H by VHF PECVD
Toshiyuki Takagi, Kazushige Takechi, Yukito Nakagawa et al. · Vacuum · 1998 · 34 citations
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