Publication | Closed Access
Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition
29
Citations
8
References
2000
Year
Materials ScienceEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsHot-wire Chemical VapourSemiconductor MaterialElectronic PropertiesThin FilmsChemical Vapor DepositionSilicon Thin FilmsThin Film Processing
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