Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition

Catalytic Chemical Vapor Deposition (CTC–CVD) Method Producing High Quality Hydrogenated Amorphous Silicon

Hideki Matsumura · Japanese Journal of Applied Physics · 1986 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +17

a-Si : H produced by high-temperature thermal decomposition of silane

H. J. Wiesmann, Ajay Ghosh, T. J. McMahon et al. · Journal of Applied Physics · 1979 · 147 citations

Engineering, Materials Engineering, Materials Science +11

Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour deposition

R.E.I. Schropp, K. F. Feenstra, Edith C. Molenbroek et al. · Philosophical Magazine B · 1997 · 131 citations

Engineering, Materials Engineering, Materials Science +17

Polycrystalline silicon films obtained by hot-wire chemical vapour deposition

J. Cifré, J. Bertomeu, Joaquim Puigdollers et al. · Applied Physics A · 1994 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +14

Amorphous and microcrystalline silicon by hot wire chemical vapor deposition

M. Heintze, R. Zedlitz, H.N. Wanka et al. · Journal of Applied Physics · 1996 · 85 citations

Engineering, Materials Engineering, Materials Science +17