Concepedia

R. Zedlitz

RZ

Statistics

Publications

11

Citations

435

H-Index

11

Active since

1992

Affiliations

University of Stuttgart(Current)

R. Zedlitz is an author at University of Stuttgart specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceMicroelectronicsElectrical EngineeringCosmic RayPhysicsNanoelectronics

Publications per year

1992–2014

11

Publications

11

Analysis of high-rate a-Si:H deposition in a VHF plasma

M. Heintze, R. Zedlitz, G.H. Bauer · Journal of Physics D Applied Physics · 1993 · 86 citations

Electrical Engineering, Plasma Electronics, Engineering +13

Amorphous and microcrystalline silicon by hot wire chemical vapor deposition

M. Heintze, R. Zedlitz, H.N. Wanka et al. · Journal of Applied Physics · 1996 · 85 citations

Engineering, Optoelectronic Devices, Silicon On Insulator +18

Properties of amorphous boron nitride thin films

R. Zedlitz, M. Heintze, M.B. Schubert · Journal of Non-Crystalline Solids · 1996 · 63 citations

Materials Science, Boron Nitride, Engineering +3

New diagnostic aspects of high rate a-Si:H deposition in a VHF plasma

M. Heintze, R. Zedlitz · Journal of Non-Crystalline Solids · 1996 · 40 citations

Engineering, Physics, Nanoelectronics +10

Deposition of a-Si:H with the hot-wire technique

R. Zedlitz, M. Heintze · Journal of Non-Crystalline Solids · 1993 · 35 citations

Engineering, Surface Science, Applied Physics +4

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