Chisato Niikura

Statistics

Publications

Citations

412

H-Index

Active since

1998

Affiliations

Centre National de la Recherche Scientifique(Current)

École Polytechnique

Laboratoire de Physique des Interfaces et des Couches Minces

Supélec

Laboratoire de Génie Électrique et Électronique de Paris

Chisato Niikura is an author at Centre National de la Recherche Scientifique specializing in materials science, semiconductor materials, and materials engineering.

Publications per year

1998–2023

Publications

Contribution of ions to the growth of amorphous, polymorphous, and microcrystalline silicon thin films

E. A. G. Hamers, Anna Fontcuberta i Morral, Chisato Niikura et al. · Journal of Applied Physics · 2000 · 93 citations

Engineering, Materials Engineering, Materials Science +13

Preparation of microcrystalline silicon films at ultra high-rate of 10 nm/s using high-density plasma

Chisato Niikura, Michio Kondo, Akihisa Matsuda · Journal of Non-Crystalline Solids · 2004 · 58 citations

Natural Sciences, Materials Engineering, Materials Science +15

High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma

Chisato Niikura, Naho Itagaki, Michio Kondo et al. · Thin Solid Films · 2004 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +16

Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition

R. Brüggemann, Jean‐Paul Kleider, Christophe Longeaud et al. · Journal of Non-Crystalline Solids · 2000 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +14

MEMS-Based Wavelength-Selective Bolometers

Thang Duy Dao, Anh Tung Doan, Satoshi Ishii et al. · Micromachines · 2019 · 28 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

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