Nature · 2003 · 597 citations · 29 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsNanotechnologySemiconductor DevicesDisplacement MeasurementDisplacement SensorsMems SensorsMicroelectromechanical SensorsNanoelectronicsNanosensorsDisplacement SensingNanoelectromechanical SensorsNanoelectronic SensorsNanometer-scale Displacement MeasurementSingle-electron Transistors
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Nanodevice motion at microwave frequencies
Xue Huang, Christian A. Zorman, Mehran Mehregany et al. · Nature · 2003 · 588 citations · Full text