Thin Solid Films · 2002 · 20 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceInterface ScienceSurface ScienceThin FilmsAluminum OxidesMetal OxidesMetalsSurface OxidationThin Film OxidationThin-film MaterialsMetal Thin FilmsOxidation BarriersOxidation-resistant CoatingsProtective Oxide FilmsThermal OxidationThin Oxide Films
13
Robustness of ultrathin aluminum oxide dielectrics on Si(001)
M. Copel, E. Cartier, E. P. Gusev et al. · Applied Physics Letters · 2001 · 127 citations
Natural Sciences, Materials Engineering, Materials Science +17