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Low-temperature growth of nanocrystalline silicon films prepared by RF magnetron sputtering: Structural and optical studies

Materials ScienceEpitaxial GrowthNanocrystalline Silicon FilmsEngineeringLow-temperature GrowthNanotechnologyApplied PhysicsRf Magnetron SputteringThin FilmsSilicon On InsulatorMicroelectronicsNanocrystalline MaterialThin Film Processing