A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface

Abstract

on the germanium Wafer Surface B. Onsia 2, , T. Conard, S. De Gendt , M. Heyns, I. Hoflijk, P. Mertens, M. Meuris, G. Raskin, S. Sioncke, I. Teerlinck, A. Theuwis J. Van Steenbergen and C. Vinckier 1 Imec, kapeldreef 75, B-3001 Heverlee, Belgium 2 K.U.Leuven, Afd. Fysische en Anal. Chemie, Celestijnenlaan 200F, B-3001 Heverlee, Belgium 3 Umicore, Watertorenstraat 33, B-2250 Olen, Belgium a [e-mail]