Deposition of phosphorus doped a-Si:H and μc-Si:H using a novel linear RF source - Concepedia

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Deposition of phosphorus doped a-Si:H and μc-Si:H using a novel linear RF source

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Citations

2

References

2008

Year

Bas B. Van Aken, C. Devilee, Maarten Dörenkämper, M. Geusebroek, M. Heijna, J. Löffler, W.J. Soppe

Journal of Non-Crystalline Solids

Semiconductor TechnologyChemical EngineeringEngineeringApplied PhysicsSemiconductor Device FabricationChemistryPhosphoreneSilicon On InsulatorSemiconductor Device

References

	Year	Citations

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