Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources - Concepedia

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Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources

56

Citations

6

References

2003

Year

H. Schlemm, Andreas Mai, S. Roth, D. Roth, K.‐M. Baumgärtner, H. Muegge

Surface and Coatings Technology

Photovoltaic CellsElectrical EngineeringEngineeringPlasma ApplicationApplied PhysicsSemiconductor Device FabricationGas Discharge PlasmaPlasma ProcessingPhotovoltaicsPlasma Sources

References

	Year	Citations

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