Concepedia

H. Schlemm

HS

Statistics

Publications

6

Citations

141

H-Index

6

Active since

1982

Affiliations

Roth and Rau (Germany)(Current)

H. Schlemm is an author at Roth and Rau (Germany) specializing in plasma sources, plasma diagnostics, and photovoltaic devices.

Publications per year

1982–2005

6

Publications

6

Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources

H. Schlemm, S. Roth, D. Roth et al. · Surface and Coatings Technology · 2003 · 57 citations

Engineering, Electrical Engineering, Materials Science +14

Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors

H. Schlemm, Daniel Roth · Surface and Coatings Technology · 2001 · 25 citations

Natural Sciences, Materials Engineering, Physics +15

Linear radio frequency plasma sources for large scale industrial applications in photovoltaics

H. Schlemm, M. Fritzsche, D. Roth · Surface and Coatings Technology · 2005 · 19 citations

Natural Sciences, Electrical Engineering, Physics +12

<i>In Situ</i> Analysis of Fluorinated Gases in Plasma Etching by Infrared Spectroscopy

H.‐U. Poll, D. Hinze, H. Schlemm · Applied Spectroscopy · 1982 · 16 citations

Natural Sciences, Chemistry, Physics +15

A radio-frequency bandpass mass filter for broad ion beams

H. Schlemm · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 14 citations

Pharmacy, Nuclear Engineering, Mass Spectrometric Analysis +12

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