Concepedia

Publication | Closed Access

The effect of electron cyclotron resonance plasma parameters on the aspect ratio of trenches in HgCdTe

DOI

30

Citations

32

References

2003

Year

A. J. Stoltz, J. D. Benson, P. R. Boyd, M. Martinka, J. B. Varesi, A. W. Kaleczyc, E. P. Smith, S. M. Johnson, W. A. Radford, J. H. Dinan
Journal of Electronic Materials

References

YearCitations

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