Thin Solid Films · 2003 · 85 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsTransparent Conducting OxidesCeramic Thin FilmsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin-film OxidesTransparent Conducting FilmsTransparent Conductive FilmsTransparent Conductive Oxides
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S. Ishibashi, Yoshiyuki Higuchi, Yukihide Ota et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 275 citations
Natural Sciences, Electrical Engineering, Materials Science +17