Ryo Tokumaru

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Publications

Citations

218

H-Index

Active since

2003

Affiliations

Semiconductor Energy Laboratory (Japan)(Current)

Aoyama Gakuin University

Tosoh (Japan)

Ryo Tokumaru is an author at Semiconductor Energy Laboratory (Japan) specializing in materials science, semiconductor materials, and materials engineering.

ORCID

Publications per year

2003–2019

Publications

Study on In2O3–SnO2 transparent and conductive films prepared by d.c. sputtering using high density ceramic targets

K. Utsumi, Hitoshi Iigusa, Ryo Tokumaru et al. · Thin Solid Films · 2003 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +16

Structural, electrical, and optical properties of transparent conductive In2O3–SnO2 films

Yasushi Sato, Ryo Tokumaru, Eriko Nishimura et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +17

High thermal tolerance of 25-nm c-axis aligned crystalline In-Ga-Zn oxide FET

Hitoshi Kunitake, Kazuaki Ohshima, Kazuki Tsuda et al. · 2018 · 41 citations

Engineering, Electrical Engineering, Materials Science +17

A ${c}$ -Axis-Aligned Crystalline In-Ga-Zn Oxide FET With a Gate Length of 21 nm Suitable for Memory Applications

Hitoshi Kunitake, Ryo Arasawa, Takako Seki et al. · IEEE Journal of the Electron Devices Society · 2019 · 38 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

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